Granted Patent
Utility
US 4,907,064 · App. 07/093,657
Semiconductor device having silicon oxynitride film with improved moisture resistance
Inventors:
Kouji Yamazaki, Hideki Gomi
Patented Case
View Patent ↗
Granted: Mar 6, 1990
Filed: Sep 8, 1987
Inventors
Kouji Yamazaki
Hideki Gomi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.