IP Library › Granted Patent US 4,907,066
Granted Patent Utility
US 4,907,066 · App. 07/158,759

Planar tungsten interconnect with implanted silicon

Inventors: David C. Thomas, S. Simon Wong
Patented Case View Patent ↗
Granted: Mar 6, 1990 Filed: Feb 22, 1988
Inventors
David C. Thomas
S. Simon Wong
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 4,907,066
App. No.
07/158,759
Filed
1988-02-22
Granted
1990-03-06
Kind
A