IP Library Granted Patent US 4,908,326
Granted Patent Utility
US 4,908,326 · App. 07/291,492

Process for fabricating self-aligned silicide lightly doped drain MOS devices

Inventors: Di Ma, David H. Hoffman
Patented Case View Patent ↗
Granted: Mar 13, 1990 Filed: Dec 29, 1988
Inventors
Di Ma
David H. Hoffman
Assignee (at issue)
STANDARD MICROSYSTEMS CORPORATION

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Quick Facts
Patent No.
US 4,908,326
App. No.
07/291,492
Filed
1988-12-29
Granted
1990-03-13
Kind
A