IP Library Granted Patent US 4,908,683
Granted Patent Utility
US 4,908,683 · App. 07/084,556

Technique for elimination of polysilicon stringers in direct moat field oxide structure

Inventors: Dyer A. Matlock, Richard L. Lichtel, Jr., Lawrence G. Pearce
Patented Case View Patent ↗
Granted: Mar 13, 1990 Filed: Aug 11, 1987
Inventors
Dyer A. Matlock
Richard L. Lichtel, Jr.
Lawrence G. Pearce
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 4,908,683
App. No.
07/084,556
Filed
1987-08-11
Granted
1990-03-13
Kind
A