IP Library Granted Patent US 4,911,809
Granted Patent Utility
US 4,911,809 · App. 07/228,897

Thin film deposition process

Inventors: Christopher John Howard Wort, Lynn Y. Dorey
Patented Case View Patent ↗
Granted: Mar 27, 1990 Filed: Aug 5, 1988
Inventors
Christopher John Howard Wort
Lynn Y. Dorey
Assignee (at issue)
Plessey Overseas Limited

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Quick Facts
Patent No.
US 4,911,809
App. No.
07/228,897
Filed
1988-08-05
Granted
1990-03-27
Kind
A