Granted Patent
Utility
US 4,912,018 · App. 07/064,437
High resolution photoresist based on imide containing polymers
Inventors:
Christopher E. Osuch, Michael J. McFarland
Patented Case
View Patent ↗
Granted: Mar 27, 1990
Filed: Jun 22, 1987
Inventors
Christopher E. Osuch
Michael J. McFarland
Assignee (at issue)
Hoechst Celanese Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.