Granted Patent
Utility
US 4,917,556 · App. 07/358,461
Modular wafer transport and processing system
Inventors:
Lawrence R. Stark, Frederick T. Turner
Patented Case
View Patent ↗
Granted: Apr 17, 1990
Filed: May 26, 1989
Inventors
Lawrence R. Stark
Frederick T. Turner
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.