Granted Patent
Utility
US 4,920,908 · App. 07/323,199
Method and apparatus for deposition of tungsten silicides
Inventors:
Daniel L. Brors, James A. Fair, Kenneth A. Monnig
Patented Case
View Patent ↗
Granted: May 1, 1990
Filed: Mar 13, 1989
Inventors
Daniel L. Brors
James A. Fair
Kenneth A. Monnig
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.