Granted Patent
Utility
US 4,923,563 · App. 07/356,591
Semiconductor field oxide formation process using a sealing sidewall of consumable nitride
Inventor:
Steven S. Lee
Patented Case
View Patent ↗
Granted: May 8, 1990
Filed: May 22, 1989
Inventor
Steven S. Lee
Assignee (at issue)
NCR Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.