Granted Patent
Utility
US 4,925,809 · App. 07/214,501
Semiconductor wafer and epitaxial growth on the semiconductor wafer with autodoping control and manufacturing method therefor
Inventors:
Tetsujiro Yoshiharu, Haruo Kamise
Patented Case
View Patent ↗
Granted: May 15, 1990
Filed: Jul 1, 1988
Inventors
Tetsujiro Yoshiharu
Haruo Kamise
Assignees (at issue)
OSAKA TITANIUM
Kyushu Electronic Metal Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.