Granted Patent
Utility
US 4,933,064 · App. 07/126,776
Sputtering cathode based on the magnetron principle
Inventors:
Michael Geisler, Jorg Kieser, Reiner Kukla
Patented Case
View Patent ↗
Granted: Jun 12, 1990
Filed: Nov 30, 1987
Inventors
Michael Geisler
Jorg Kieser
Reiner Kukla
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.