Granted Patent
Utility
US 4,933,263 · App. 07/156,663
Forming method of resist pattern
Inventors:
Yoshimitsu Okuda, Morio Inoue, Yukio Takashima, Tohru Ohkuma
Patented Case
View Patent ↗
Granted: Jun 12, 1990
Filed: Feb 17, 1988
Inventors
Yoshimitsu Okuda
Morio Inoue
Yukio Takashima
Tohru Ohkuma
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.