Granted Patent
Utility
US 4,936,877 · App. 07/381,583
Dopant delivery system for semiconductor manufacture
Inventors:
Steven J. Hultquist, Glenn M. Tom
Patented Case
View Patent ↗
Granted: Jun 26, 1990
Filed: Jul 18, 1989
Inventors
Steven J. Hultquist
Glenn M. Tom
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.