Granted Patent
Utility
US 4,939,103 · App. 06/655,439
Method of diffusing plurality of dopants simultaneously from vapor phase into semiconductor substrate
Inventor:
Laszlo Szolgyemy
Patented Case
View Patent ↗
Granted: Jul 3, 1990
Filed: Sep 28, 1984
Inventor
Laszlo Szolgyemy
Assignee (at issue)
Mitel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.