IP Library › Granted Patent US 4,940,510
Granted Patent Utility
US 4,940,510 · App. 07/055,844

Method of etching in the presence of positive photoresist

Inventor: Roy J. Burt
Patented Case View Patent ↗
Granted: Jul 10, 1990 Filed: Jun 1, 1987
Inventor
Roy J. Burt
Assignee (at issue)
Digital Equipment Corporation

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Quick Facts
Patent No.
US 4,940,510
App. No.
07/055,844
Filed
1987-06-01
Granted
1990-07-10
Kind
A