Granted Patent
Utility
US 4,944,119 · App. 07/208,685
Apparatus for transporting wafer to and from polishing head
Inventors:
Gerald L. Gill, Jr., Thomas C. Hyde
Patented Case
View Patent ↗
Granted: Jul 31, 1990
Filed: Jun 20, 1988
Inventors
Gerald L. Gill, Jr.
Thomas C. Hyde
Assignee (at issue)
Westech Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.