Granted Patent
Utility
US 4,944,650 · App. 07/263,726
Apparatus for detecting and centering wafer
Inventor:
Tatsumi Matsumoto
Patented Case
View Patent ↗
Granted: Jul 31, 1990
Filed: Oct 28, 1988
Inventor
Tatsumi Matsumoto
Assignee (at issue)
Mitsubishi Kinzoku Kabushiki Kaisha
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.