Granted Patent
Utility
US 4,946,576 · App. 07/311,401
Apparatus for the application of thin layers to a substrate
Inventors:
Anton Dietrich, Klaus Hartig
Patented Case
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Granted: Aug 7, 1990
Filed: Feb 14, 1989
Inventors
Anton Dietrich
Klaus Hartig
Assignee (at issue)
Leybold GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.