IP Library Granted Patent US 4,957,780
Granted Patent Utility
US 4,957,780 · App. 07/407,980

Internal reactor method for chemical vapor deposition

Inventors: Vinod K. Sarin, Charles D'Angelo, III, Helen E. Rebenne
Patented Case View Patent ↗
Granted: Sep 18, 1990 Filed: Sep 15, 1989
Inventors
Vinod K. Sarin
Charles D'Angelo, III
Helen E. Rebenne
Assignee (at issue)
GTE Laboratories Incorporated

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Quick Facts
Patent No.
US 4,957,780
App. No.
07/407,980
Filed
1989-09-15
Granted
1990-09-18
Kind
A