IP Library Granted Patent US 4,958,079
Granted Patent Utility
US 4,958,079 · App. 07/313,022

Detector for scanning electron microscopy apparatus

Inventor: John Gray
Patented Case View Patent ↗
Granted: Sep 18, 1990 Filed: Feb 21, 1989
Inventor
John Gray
Assignee (at issue)
Galileo Electro-Optics Corps.

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Quick Facts
Patent No.
US 4,958,079
App. No.
07/313,022
Filed
1989-02-21
Granted
1990-09-18
Kind
A