IP Library › Granted Patent US 4,958,658
Granted Patent Utility
US 4,958,658 · App. 07/066,801

Mass flow stabilized

Inventor: John Zajac
Patented Case View Patent ↗
Granted: Sep 25, 1990 Filed: Jun 25, 1987
Inventor
John Zajac
Assignee (at issue)
TEGAL CORPORATION

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Quick Facts
Patent No.
US 4,958,658
App. No.
07/066,801
Filed
1987-06-25
Granted
1990-09-25
Kind
A