Granted Patent
Utility
US 4,963,501 · App. 07/412,253
Method of fabricating semiconductor devices with sub-micron linewidths
Inventors:
Frank Ryan, James W. Penney, Aditya Gupta
Patented Case
View Patent ↗
Granted: Oct 16, 1990
Filed: Sep 25, 1989
Inventors
Frank Ryan
James W. Penney
Aditya Gupta
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.