Granted Patent
Utility
US 4,965,862 · App. 07/407,855
Disk scanning apparatus for batch ion implanters
Inventors:
Avrum Freytsis, Judy E. Sedgewick
Patented Case
View Patent ↗
Granted: Oct 23, 1990
Filed: Sep 15, 1989
Inventors
Avrum Freytsis
Judy E. Sedgewick
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.