Granted Patent
Utility
US 4,968,339 · App. 07/459,605
Method of fluorine doped modified chemical vapor deposition
Inventors:
Thomas J. Miller, Douglas W. Monroe, David A. Nicol, David B. Steele
Patented Case
View Patent ↗
Granted: Nov 6, 1990
Filed: Jan 2, 1990
Inventors
Thomas J. Miller
Douglas W. Monroe
David A. Nicol
David B. Steele
Assignee (at issue)
AT&T Bell Laboratories
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.