IP Library Granted Patent US 4,968,636
Granted Patent Utility
US 4,968,636 · App. 07/407,449

Embedded isolation region and process for forming the same on silicon substrate

Inventor: Fumio Sugawara
Patented Case View Patent ↗
Granted: Nov 6, 1990 Filed: Sep 14, 1989
Inventor
Fumio Sugawara
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.

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Quick Facts
Patent No.
US 4,968,636
App. No.
07/407,449
Filed
1989-09-14
Granted
1990-11-06
Kind
A