IP Library › Granted Patent US 4,971,021
Granted Patent Utility
US 4,971,021 · App. 07/223,802

Apparatus for cutting semiconductor crystal

Inventors: Yutaka Kubotera, Kazunari Akiyama
Patented Case View Patent ↗
Granted: Nov 20, 1990 Filed: Jul 25, 1988
Inventors
Yutaka Kubotera
Kazunari Akiyama
Assignee (at issue)
Mitsubishi Kinzoku Kabushiki Kaisha

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Quick Facts
Patent No.
US 4,971,021
App. No.
07/223,802
Filed
1988-07-25
Granted
1990-11-20
Kind
A