IP Library › Granted Patent US 4,977,855
Granted Patent Utility
US 4,977,855 · App. 07/261,833

Apparatus for forming film with surface reaction

Inventors: Tadahiro Ohmi, Masaru Umeda
Patented Case View Patent ↗
Granted: Dec 18, 1990 Filed: Sep 28, 1988
Inventors
Tadahiro Ohmi
Masaru Umeda
Assignee (at issue)
Ohmi, Tadahiro

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Quick Facts
Patent No.
US 4,977,855
App. No.
07/261,833
Filed
1988-09-28
Granted
1990-12-18
Kind
A