Granted Patent
Utility
US 4,978,437 · App. 07/009,075
Method of applying optical coatings of silicon compounds by cathode sputtering, and a sputtering cathode for the practice of the method
Inventor:
Peter Wirz
Patented Case
View Patent ↗
Granted: Dec 18, 1990
Filed: Jan 27, 1987
Inventor
Peter Wirz
Assignee (at issue)
Leybold GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.