Granted Patent
Utility
US 4,979,466 · App. 07/320,600
Apparatus for selective deposition of metal thin film
Inventor:
Eisuke Nishitani
Patented Case
View Patent ↗
Granted: Dec 25, 1990
Filed: Mar 8, 1989
Inventor
Eisuke Nishitani
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.