IP Library › Granted Patent US 4,981,550
Granted Patent Utility
US 4,981,550 · App. 07/270,389

Semiconductor device having tungsten plugs

Inventors: Robert D. Huttemann, Nun-Sian Tsai
Patented Case View Patent ↗
Granted: Jan 1, 1991 Filed: Nov 9, 1988
Inventors
Robert D. Huttemann
Nun-Sian Tsai
Assignee (at issue)
AT&T Bell Laboratories

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Quick Facts
Patent No.
US 4,981,550
App. No.
07/270,389
Filed
1988-11-09
Granted
1991-01-01
Kind
A