Granted Patent
Utility
US 4,983,363 · App. 07/163,792
Apparatus for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
Inventors:
Glenn M. Tom, Duncan W. Brown
Patented Case
View Patent ↗
Granted: Jan 8, 1991
Filed: Mar 3, 1988
Inventors
Glenn M. Tom
Duncan W. Brown
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.