Granted Patent
Utility
US 4,983,537 · App. 07/440,962
Method of making a buried oxide field isolation structure
Inventor:
Ching-Yeu Wei
Patented Case
View Patent ↗
Granted: Jan 8, 1991
Filed: Nov 24, 1989
Inventor
Ching-Yeu Wei
Assignee (at issue)
General Electric Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.