Granted Patent
Utility
US 4,987,311 · App. 07/391,202
Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine
Inventor:
William J. DeVore
Patented Case
View Patent ↗
Granted: Jan 22, 1991
Filed: Aug 8, 1989
Inventor
William J. DeVore
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.