Granted Patent
Utility
US 4,988,640 · App. 07/433,080
Method of doping and implanting using arsine, antimony, and phosphine substitutes
Inventors:
David A. Bohling, Gregory T. Muhr, David A. Roberts
Patented Case
View Patent ↗
Granted: Jan 29, 1991
Filed: Nov 6, 1989
Inventors
David A. Bohling
Gregory T. Muhr
David A. Roberts
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.