IP Library Granted Patent US 4,988,643
Granted Patent Utility
US 4,988,643 · App. 07/419,284

Self-aligning metal interconnect fabrication

Inventor: Morris Tsou
Patented Case View Patent ↗
Granted: Jan 29, 1991 Filed: Oct 10, 1989
Inventor
Morris Tsou
Assignee (at issue)
VLSI Technology, Inc.

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Quick Facts
Patent No.
US 4,988,643
App. No.
07/419,284
Filed
1989-10-10
Granted
1991-01-29
Kind
A