Granted Patent
Utility
US 4,989,345 · App. 07/451,950
Centrifugal spin dryer for semiconductor wafer
Inventor:
Gerald L. Gill, Jr.
Patented Case
View Patent ↗
Granted: Feb 5, 1991
Filed: Dec 18, 1989
Inventor
Gerald L. Gill, Jr.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.