Granted Patent
Utility
US 4,992,301 · App. 07/247,850
Chemical vapor deposition apparatus for obtaining high quality epitaxial layer with uniform film thickness
Inventors:
Seiichi Shishiguchi, Fumitoshi Toyokawa, Masao Mikami
Patented Case
View Patent ↗
Granted: Feb 12, 1991
Filed: Sep 22, 1988
Inventors
Seiichi Shishiguchi
Fumitoshi Toyokawa
Masao Mikami
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.