Granted Patent
Utility
US 5,008,705 · App. 07/513,783
Autofocus system for microlithography
Inventor:
Glenn Sindledecker
Patented Case
View Patent ↗
Granted: Apr 16, 1991
Filed: Apr 23, 1990
Inventor
Glenn Sindledecker
Assignee (at issue)
Federal Signal Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.