Granted Patent
Utility
US 5,015,492 · App. 07/331,795
Method and apparatus for pulsed energy induced vapor deposition of thin films
Inventors:
Thirumalai Venkatesan, Xin Wu
Patented Case
View Patent ↗
Granted: May 14, 1991
Filed: Apr 3, 1989
Inventors
Thirumalai Venkatesan
Xin Wu
Assignees (at issue)
Rutgers University
Bell Communications Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.