Granted Patent
Utility
US 5,017,236 · App. 07/396,116
High frequency sonic substrate processing module
Inventors:
Sherman U. Moxness, Robert W. Grant
Patented Case
View Patent ↗
Granted: May 21, 1991
Filed: Aug 21, 1989
Inventors
Sherman U. Moxness
Robert W. Grant
Assignee (at issue)
FSI INTERNATIONAL, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.