IP Library › Granted Patent US 5,017,404
Granted Patent Utility
US 5,017,404 · App. 07/403,429

Plasma CVD process using a plurality of overlapping plasma columns

Inventors: Volker Paquet, Ulrich Ackermann, Heniz-W. Etzkorn, Ralf Kersten, Uwe Rutze
Patented Case View Patent ↗
Granted: May 21, 1991 Filed: Sep 6, 1989
Inventors
Volker Paquet
Ulrich Ackermann
Heniz-W. Etzkorn
Ralf Kersten
Uwe Rutze
Assignee (at issue)
Schott Glaswerke

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Quick Facts
Patent No.
US 5,017,404
App. No.
07/403,429
Filed
1989-09-06
Granted
1991-05-21
Kind
A