IP Library Granted Patent US 5,017,751
Granted Patent Utility
US 5,017,751 · App. 07/541,576

Inductively-coupled RF plasma torch

Inventors: Charles Brecher, Richard C. Assmus, Jonathan S. Brecher
Patented Case View Patent ↗
Granted: May 21, 1991 Filed: Jun 21, 1990
Inventors
Charles Brecher
Richard C. Assmus
Jonathan S. Brecher
Assignee (at issue)
GTE Laboratories Incorporated

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Quick Facts
Patent No.
US 5,017,751
App. No.
07/541,576
Filed
1990-06-21
Granted
1991-05-21
Kind
A