IP Library Granted Patent US 5,019,479
Granted Patent Utility
US 5,019,479 · App. 07/373,592

Positive type radiation-sensitive resin composition comprising a photosensitizer and a novolak resin

Inventors: Hiroshi Oka, Chozo Okuda, Yoshinori Yoshida, Toshihiko Takahashi, Yoichi Kamoshida, Takao Miura
Patented Case View Patent ↗
Granted: May 28, 1991 Filed: Jun 30, 1989
Inventors
Hiroshi Oka
Chozo Okuda
Yoshinori Yoshida
Toshihiko Takahashi
Yoichi Kamoshida
Takao Miura
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,019,479
App. No.
07/373,592
Filed
1989-06-30
Granted
1991-05-28
Kind
A