IP Library Granted Patent US 5,019,488
Granted Patent Utility
US 5,019,488 · App. 07/517,530

Method of producing an image reversal negative photoresist having a photo-labile blocked imide

Inventors: Donald Mammato, Sangya Jain, Dana L. Durham, Mark A. Spak, Douglas A. Usifer, Michael J. McFarland
Patented Case View Patent ↗
Granted: May 28, 1991 Filed: Apr 24, 1990
Inventors
Donald Mammato
Sangya Jain
Dana L. Durham
Mark A. Spak
Douglas A. Usifer
Michael J. McFarland
Assignee (at issue)
Hoechst Celanese Corporation

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Quick Facts
Patent No.
US 5,019,488
App. No.
07/517,530
Filed
1990-04-24
Granted
1991-05-28
Kind
A