IP Library Granted Patent US 5,019,712
Granted Patent Utility
US 5,019,712 · App. 07/363,230

Production of focused ion cluster beams

Inventor: Wolfgang Knauer
Patented Case View Patent ↗
Granted: May 28, 1991 Filed: Jun 8, 1989
Inventor
Wolfgang Knauer
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 5,019,712
App. No.
07/363,230
Filed
1989-06-08
Granted
1991-05-28
Kind
A