Granted Patent
Utility
US 5,024,921 · App. 07/552,394
Thermally stable light-sensitive compositions with o-quinone diazide and phenolic resin used in a method of forming a positive photoresist image
Inventors:
Andrew J. Blakeney, Alfred T. Jeffries, III, Thomas R. Sarubbi
Patented Case
View Patent ↗
Granted: Jun 18, 1991
Filed: Sep 21, 1990
Inventors
Andrew J. Blakeney
Alfred T. Jeffries, III
Thomas R. Sarubbi
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.