Granted Patent
Utility
US 5,042,949 · App. 07/325,378
Optical profiler for films and substrates
Inventors:
Jeffrey S. Greenberg, Jay E. Robinson, James M. Young, Daniel A. Cohen
Patented Case
View Patent ↗
Granted: Aug 27, 1991
Filed: Mar 17, 1989
Inventors
Jeffrey S. Greenberg
Jay E. Robinson
James M. Young
Daniel A. Cohen
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.