IP Library Granted Patent US 5,059,513
Granted Patent Utility
US 5,059,513 · App. 07/366,088

Photochemical image process of positive photoresist element with maleimide copolymer

Inventors: Frederick R. Hopf, Michael J. McFarland, Christopher E. Osuch
Patented Case View Patent ↗
Granted: Oct 22, 1991 Filed: Jun 14, 1989
Inventors
Frederick R. Hopf
Michael J. McFarland
Christopher E. Osuch
Assignee (at issue)
Hoechst Celanese Corporation

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Quick Facts
Patent No.
US 5,059,513
App. No.
07/366,088
Filed
1989-06-14
Granted
1991-10-22
Kind
A