IP Library Granted Patent US 5,081,001
Granted Patent Utility
US 5,081,001 · App. 07/543,324

Blocked monomer and polymers therefrom for use as photoresists

Inventors: Christopher E. Osuch, Michael J. McFarland
Patented Case View Patent ↗
Granted: Jan 14, 1992 Filed: Jun 25, 1990
Inventors
Christopher E. Osuch
Michael J. McFarland
Assignee (at issue)
Hoechst Celanese Corporation

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Quick Facts
Patent No.
US 5,081,001
App. No.
07/543,324
Filed
1990-06-25
Granted
1992-01-14
Kind
A