IP Library Granted Patent US 5,081,061
Granted Patent Utility
US 5,081,061 · App. 07/668,694

Manufacturing ultra-thin dielectrically isolated wafers

Inventors: George V. Rouse, Paul S. Reinecke
Patented Case View Patent ↗
Granted: Jan 14, 1992 Filed: Mar 7, 1991
Inventors
George V. Rouse
Paul S. Reinecke
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 5,081,061
App. No.
07/668,694
Filed
1991-03-07
Granted
1992-01-14
Kind
A